Kinema Product 1

PLASMATOR encompasses the complete range of chemical processes in laboratory plasmas, and aids in the design and optimization of plasma reactors for integrated circuit manufacturing and other large area applications. PLASMATOR is a two-dimensional numerical model that simulates electron, ion and neutral transport, including detailed volume and surface chemistry. The code also solves for space charged, rf-coil induced and ac-biased substrate rf-generated electric fields.

PLASMATOR is designed to solve two dimensional, (cylindrically symmetric) time-dependent fluid equations for electrons and ions self-consistently with Poisson's equation for the electric potential. In addition, the model software calculates RF inductive heating from a time-averaged solution of Maxwell's equations using a field solver from Oak Ridge National Laboratory. PLASMATOR also solves electron continuity and momentum equations, and incorporates a fluid dynamic treatment of transport equations.

PLASMATOR incorporates a graphical user interface for MS Windows, graphical input/output, viewable output during execution, and drag and drop chamber design. PLASMATOR accurately and effieciently models inductively and capacitively driven high- and low- pressure plasma discharges using transport coefficients based on Maxwellian or non-Maxwellian energy distribution. With built-in models for atomic and molecular collisions and plasma chemistries, Kinema's software is equipped to handle all electron, ion and neutral reactions. PLASMATOR also models multiple sets of inductive coils with seperate driving frequency and power while seperately treating metal structures as fixed DC potential, floating potential, or RF potential.

Additional Features

2-D time dependent plasma discharge model
Fluid dynamic treatment of transport equations
Electrons, multiple ions (positive and negative) and neutral species
Cartesian (x,y) or cylindrical geometry (r,z) on a non-uniform mesh
Restarts automatically remap variable profiles from old mesh to new
Coarse mesh solutions can be used to rapidly explore high resolution effects
Sheaths can be spatially resolved using locally fine mesh gridding